EUV lithography — how chips are exposed (3D)

About this app

How an EUV scanner exposes chips: tin plasma, collector, facet mirrors, a reflective mask and six projection mirrors image the pattern onto the wafer, reduced 4 : 1. Slow motion of the source, the power loss over 10 mirrors and a computed aerial image show why 13.5 nm allows finer features than DUV.

Subject: Devices & operating manuals

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